System and method for manufacturing self-aligned STI with single poly
US-9276007-B2 · Mar 1, 2016 · US
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Patent family 50002947
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50002947 |
| Family type | — |
| Earliest priority | Dec 15, 2006 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9276007B2 — System and method for manufacturing self-aligned STI with single poly |
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US9276007B2 — System and method for manufacturing self-aligned STI with single poly (published Mar 1, 2016)
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