Apparatus and methods for aberration correction in electron beam based system
US-9607802-B2 · Mar 28, 2017 · US
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Patent family 48620135
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 48620135 |
| Family type | — |
| Earliest priority | Nov 2, 2011 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US9607802B2 — Apparatus and methods for aberration correction in electron beam based system |
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US9607802B2 — Apparatus and methods for aberration correction in electron beam based system (published Mar 28, 2017)
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