Optical grating phase modulator for laser interference photoetching system
US-9869857-B2 · Jan 16, 2018 · US
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Patent family 48106941
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 48106941 |
| Family type | — |
| Earliest priority | Jan 17, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9869857B2 — Optical grating phase modulator for laser interference photoetching system |
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US9869857B2 — Optical grating phase modulator for laser interference photoetching system (published Jan 16, 2018)
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