Apparatus and methods for measuring thermally induced reticle distortion
US-11313758-B2 · Apr 26, 2022 · US
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Patent family 45972772
This patent family groups 9 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 45972772 |
| Family type | — |
| Earliest priority | Oct 21, 2010 |
| First filing country | US |
| Member publications | 9 |
| Countries | US |
| Representative publication | US11313758B2 — Apparatus and methods for measuring thermally induced reticle distortion |
Representative publication
Best representative member for this family based on priority and filing country.
US11313758B2 — Apparatus and methods for measuring thermally induced reticle distortion (published Apr 26, 2022)
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