Polishing apparatus having substrate holding apparatus
US-9149903-B2 · Oct 6, 2015 · US
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Patent family 45771069
This patent family groups 5 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 45771069 |
| Family type | — |
| Earliest priority | Sep 8, 2010 |
| First filing country | US |
| Member publications | 5 |
| Countries | US |
| Representative publication | US9149903B2 — Polishing apparatus having substrate holding apparatus |
Representative publication
Best representative member for this family based on priority and filing country.
US9149903B2 — Polishing apparatus having substrate holding apparatus (published Oct 6, 2015)
Member publications
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