Inertial wafer centering end effector and transport apparatus
US-9437469-B2 · Sep 6, 2016 · US
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Patent family 39887178
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 39887178 |
| Family type | — |
| Earliest priority | Apr 27, 2007 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9437469B2 — Inertial wafer centering end effector and transport apparatus |
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US9437469B2 — Inertial wafer centering end effector and transport apparatus (published Sep 6, 2016)
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