Substrate processing method and substrate processing apparatus
US-2021010130-A1 · Jan 14, 2021 · US
with adjustment of stroke or timing; Calibration thereof; Testing · Cooperative Patent Classification (CPC)
Computing, optics, measurement, and control technologies.
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | G01F3/223 |
| Official title | {with adjustment of stroke or timing; Calibration thereof; Testing} |
| Display label | with adjustment of stroke or timing; Calibration thereof; Testing |
| Total patents | 3 |
Year-over-year patent counts classified under this CPC code.
Filing activity appears stable based on the most recent years.
| Year | Patents |
|---|---|
| 2017 | 1 |
| 2019 | 1 |
| 2021 | 1 |
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
US-2021010130-A1 · Jan 14, 2021 · US
US-10480979-B2 · Nov 19, 2019 · US
US-2017343405-A1 · Nov 30, 2017 · US