Electrostatic chuck, method of manufacturing electrostatic chuck, and device for manufacturing display apparatus
US-2025357172-A1 · Nov 20, 2025 · US
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Stationary devices
Stationary devices · Cooperative Patent Classification (CPC)
Separating, mixing, shaping, printing, and transporting materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | B23Q3/154 |
| Official title | Stationary devices |
| Display label | Stationary devices |
| Total patents | 17 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 1 |
| 2018 | 2 |
| 2019 | 4 |
| 2020 | 1 |
| 2021 | 3 |
| 2023 | 2 |
| 2025 | 4 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Electrostatic chuck apparatus
US-12434341-B2 · Oct 7, 2025 · US
Holding member and method of manufacturing holding member
US-2025144757-A1 · May 8, 2025 · US
Substrate support device
US-12233501-B2 · Feb 25, 2025 · US
Electrostatic chuck apparatus
US-2023339059-A1 · Oct 26, 2023 · US
Substrate support device
US-2023256551-A1 · Aug 17, 2023 · US
Carbon nanotube electrostatic chuck
US-2021225682-A1 · Jul 22, 2021 · US
Carbon nanotube electrostatic chuck
US-11069554-B1 · Jul 20, 2021 · US
Clamping apparatus
US-10967485-B2 · Apr 6, 2021 · US
Magnetic Adsorption Device
US-2020075210-A1 · Mar 5, 2020 · US
Work clamping device
US-10512995-B2 · Dec 24, 2019 · US
Substrate holding apparatus
US-2019295876-A1 · Sep 26, 2019 · US
Clamping apparatus
US-2019184526-A1 · Jun 20, 2019 · US
Work holder and work machining method
US-10207332-B2 · Feb 19, 2019 · US
Work clamping device
US-2018093358-A1 · Apr 5, 2018 · US
Work holder and work machining method
US-2018029137-A1 · Feb 1, 2018 · US
Magnetic device for gripping and clamping a workpiece in a machining unit or machining line
US-8967603-B2 · Mar 3, 2015 · US