Optimization flows of source, mask and projection optics
US-9588438-B2 · Mar 7, 2017 · US
Hsu Duan-Fu was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Hsu Duan-Fu |
| Year | 2017 |
| Patents | 1 |
Representative publications for Hsu Duan-Fu in 2017.
US-9588438-B2 · Mar 7, 2017 · US
Most common classification codes for Hsu Duan-Fu in 2017.
| CPC | Patents |
|---|---|
| G03F7/70066 | 1 |
| G03F7/70091 | 1 |
| G03F7/70125 | 1 |
| G03F7/70433 | 1 |
| G03F7/70441 | 1 |
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