Compositions and methods for selective polishing of silicon nitride materials
US-9633863-B2 · Apr 25, 2017 · US
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Ward William patents
Ward William holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | May 12, 2015 |
| Latest publication | Apr 25, 2017 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Compositions and methods for selective polishing of silicon nitride materials
US-9633863-B2 · Apr 25, 2017 · US
Method to selectively polish silicon carbide films
US-9548211-B2 · Jan 17, 2017 · US
Polishing composition and method utilizing abrasive particles treated with an aminosilane
US-9028572-B2 · May 12, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P95/062 | 3 |
| C09G1/02 | 3 |
| H01L21/31053 | 3 |
| C09K3/1463 | 2 |
| B24B37/044 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 3 |
| Electricity | 3 |
| Operations & Transport | 2 |