Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method
US-9416448-B2 · Aug 16, 2016 · US
Honma Manabu holds 9 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 9 |
| Recent patents | 0 |
| First publication | Feb 3, 2015 |
| Latest publication | Aug 16, 2016 |
Year-over-year patent counts for this assignee.
Latest publications where this party is an assignee.
US-9416448-B2 · Aug 16, 2016 · US
US-9297072-B2 · Mar 29, 2016 · US
US-9267204-B2 · Feb 23, 2016 · US
US-9103030-B2 · Aug 11, 2015 · US
US-9093490-B2 · Jul 28, 2015 · US
Representative or frequently cited publications from precomputed assignee stats.
US-9416448-B2 · Aug 16, 2016 · US
US-9297072-B2 · Mar 29, 2016 · US
US-9267204-B2 · Feb 23, 2016 · US
US-9103030-B2 · Aug 11, 2015 · US
US-9093490-B2 · Jul 28, 2015 · US
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| C23C16/45551 | 6 |
| C23C16/402 | 4 |
| C23C16/45578 | 4 |
| H10P72/7621 | 3 |
| H10P72/7618 | 3 |
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 9 |
| Electricity | 6 |
| Operations & Transport | 1 |
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