Projection exposure system for microlithography and method of monitoring a lateral imaging stability
US-9235142-B2 · Jan 12, 2016 · US
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Rauthe-Schoech Armin — Physics
Rauthe-Schoech Armin holds 1 patent in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Rauthe-Schoech Armin |
| Technology | Physics |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2016 |
| Last year | 2016 |
Representative patents
Notable publications linking Rauthe-Schoech Armin to Physics.
Projection exposure system for microlithography and method of monitoring a lateral imaging stability
US-9235142-B2 · Jan 12, 2016 · US
Projection exposure system for microlithography and method of monitoring a lateral imaging stability
US-9235142-B2 · Jan 12, 2016 · US
Projection exposure system for microlithography and method of monitoring a lateral imaging stability
US-9235142-B2 · Jan 12, 2016 · US
Recent filings
Latest patents from Rauthe-Schoech Armin in Physics.
Projection exposure system for microlithography and method of monitoring a lateral imaging stability
US-9235142-B2 · Jan 12, 2016 · US
Projection exposure system for microlithography and method of monitoring a lateral imaging stability
US-9235142-B2 · Jan 12, 2016 · US
Projection exposure system for microlithography and method of monitoring a lateral imaging stability
US-9235142-B2 · Jan 12, 2016 · US
Projection exposure system for microlithography and method of monitoring a lateral imaging stability
US-9235142-B2 · Jan 12, 2016 · US
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