Transfer robot with substrate cooling
US-10265868-B2 · Apr 23, 2019 · US
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Matsumoto Takayuki — Electricity
Matsumoto Takayuki holds 2 patents in Electricity, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Matsumoto Takayuki |
| Technology | Electricity |
| Patents in slice | 2 |
| Recent patents in slice | 0 |
| First year | 2017 |
| Last year | 2019 |
Representative patents
Notable publications linking Matsumoto Takayuki to Electricity.
Transfer robot with substrate cooling
US-10265868-B2 · Apr 23, 2019 · US
Transfer robot with substrate cooling
US-10265868-B2 · Apr 23, 2019 · US
Transfer robot with substrate cooling
US-10265868-B2 · Apr 23, 2019 · US
Substrate transfer robot with chamber and substrate monitoring capability
US-9691650-B2 · Jun 27, 2017 · US
Recent filings
Latest patents from Matsumoto Takayuki in Electricity.
Transfer robot with substrate cooling
US-10265868-B2 · Apr 23, 2019 · US
Transfer robot with substrate cooling
US-10265868-B2 · Apr 23, 2019 · US
Transfer robot with substrate cooling
US-10265868-B2 · Apr 23, 2019 · US
Transfer robot with substrate cooling
US-10265868-B2 · Apr 23, 2019 · US
Substrate transfer robot with chamber and substrate monitoring capability
US-9691650-B2 · Jun 27, 2017 · US
Related pages
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