Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same
US-9952502-B2 · Apr 24, 2018 · US
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Jeon Hwanchul patents in 2018
Jeon Hwanchul was listed as an assignee on 1 patent publication in 2018.
| Metric | Value |
|---|---|
| Company | Jeon Hwanchul |
| Year | 2018 |
| Patents | 1 |
Patents
Representative publications for Jeon Hwanchul in 2018.
Top CPC classifications
Most common classification codes for Jeon Hwanchul in 2018.
| CPC | Patents |
|---|---|
| G03F1/62 | 1 |
| G03F1/64 | 1 |
| G03F7/2004 | 1 |
| G03F7/70983 | 1 |
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