Apparatus for controlling the temperature uniformity of a substrate
US-9267742-B2 · Feb 23, 2016 · US
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Tavassoli Hamid patents
Tavassoli Hamid holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Mar 17, 2015 |
| Latest publication | Feb 23, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Apparatus for controlling the temperature uniformity of a substrate
US-9267742-B2 · Feb 23, 2016 · US
Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity
US-9248509-B2 · Feb 2, 2016 · US
Plasma reactor with a multiple zone thermal control feed forward control apparatus
US-8980044-B2 · Mar 17, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P72/0421 | 2 |
| H01L21/67069 | 2 |
| H10P72/722 | 1 |
| Y10T279/23 | 1 |
| B23B31/28 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Mechanical Engineering | 2 |
| Electricity | 2 |
| Operations & Transport | 1 |
| Cross-Sectional Technologies | 1 |