Endpoint detector for a semiconductor processing station and associated methods
US-9002493-B2 · Apr 7, 2015 · US
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Zhang John H patents in 2015
Zhang John H was listed as an assignee on 2 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Zhang John H |
| Year | 2015 |
| Patents | 2 |
Patents
Representative publications for Zhang John H in 2015.
Top CPC classifications
Most common classification codes for Zhang John H in 2015.
| CPC | Patents |
|---|---|
| A46B13/001 | 1 |
| A46B15/0004 | 1 |
| B24B37/013 | 1 |
| B24B49/12 | 1 |
| H01L21/02052 | 1 |
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