Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber
US-9079228-B2 · Jul 14, 2015 · US
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Avoyan Armen patents in 2015
Avoyan Armen was listed as an assignee on 1 patent publication in 2015.
| Metric | Value |
|---|---|
| Company | Avoyan Armen |
| Year | 2015 |
| Patents | 1 |
Patents
Representative publications for Avoyan Armen in 2015.
Top CPC classifications
Most common classification codes for Avoyan Armen in 2015.
| CPC | Patents |
|---|---|
| B08B3/08 | 1 |
| C11D2111/22 | 1 |
| C11D3/43 | 1 |
| H10P70/15 | 1 |
| H10P70/20 | 1 |
Related pages
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