Semiconductor processing system and methods using capacitively coupled plasma
US-10283321-B2 · May 7, 2019 · US
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Venkataraman Shankar patents
Venkataraman Shankar holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Mar 15, 2016 |
| Latest publication | May 7, 2019 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Surface treatment and deposition for reduced outgassing
US-9404178-B2 · Aug 2, 2016 · US
Module for ozone cure and post-cure moisture treatment
US-9285168-B2 · Mar 15, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Semiconductor processing system and methods using capacitively coupled plasma
US-10283321-B2 · May 7, 2019 · US
Surface treatment and deposition for reduced outgassing
US-9404178-B2 · Aug 2, 2016 · US
Module for ozone cure and post-cure moisture treatment
US-9285168-B2 · Mar 15, 2016 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| C23C16/56 | 2 |
| C23C16/401 | 2 |
| H10P14/69433 | 1 |
| H10P14/69215 | 1 |
| H10P14/6336 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 3 |
| Chemistry & Metallurgy | 2 |
| Mechanical Engineering | 1 |