Semiconductor processing system and methods using capacitively coupled plasma
US-10283321-B2 · May 7, 2019 · US
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Miller Matthew L patents in 2019
Miller Matthew L was listed as an assignee on 1 patent publication in 2019.
| Metric | Value |
|---|---|
| Company | Miller Matthew L |
| Year | 2019 |
| Patents | 1 |
Patents
Representative publications for Miller Matthew L in 2019.
Top CPC classifications
Most common classification codes for Miller Matthew L in 2019.
| CPC | Patents |
|---|---|
| H01J37/32091 | 1 |
| H01J37/32422 | 1 |
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