Method and apparatus for reducing particle defects in plasma etch chambers
US-10658161-B2 · May 19, 2020 · US
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He Xiaoming patents
He Xiaoming holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Feb 9, 2016 |
| Latest publication | May 19, 2020 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method and apparatus for reducing particle defects in plasma etch chambers
US-10658161-B2 · May 19, 2020 · US
Methods for the cryopreservation of cells
US-9538745-B2 · Jan 10, 2017 · US
System and method for post-exposure dosimetry using electron paramagnetic resonance spectroscopy
US-9255901-B2 · Feb 9, 2016 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Human Necessities | 1 |
| Physics | 1 |
| Electricity | 1 |