Substrate temperature control method and plasma processing apparatus
US-9207689-B2 · Dec 8, 2015 · US
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Koshimizu Chishio — Physics
Koshimizu Chishio holds 3 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Koshimizu Chishio |
| Technology | Physics |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2015 |
Representative patents
Notable publications linking Koshimizu Chishio to Physics.
Temperature control system including sub-chiller
US-9019505-B2 · Apr 28, 2015 · US
Temperature control system including sub-chiller
US-9019505-B2 · Apr 28, 2015 · US
Plasma processing apparatus and temperature measuring method and apparatus used therein
US-8986494-B2 · Mar 24, 2015 · US
Plasma processing apparatus and temperature measuring method and apparatus used therein
US-8986494-B2 · Mar 24, 2015 · US
Recent filings
Latest patents from Koshimizu Chishio in Physics.
Substrate temperature control method and plasma processing apparatus
US-9207689-B2 · Dec 8, 2015 · US
Temperature control system including sub-chiller
US-9019505-B2 · Apr 28, 2015 · US
Temperature control system including sub-chiller
US-9019505-B2 · Apr 28, 2015 · US
Plasma processing apparatus and temperature measuring method and apparatus used therein
US-8986494-B2 · Mar 24, 2015 · US
Plasma processing apparatus and temperature measuring method and apparatus used therein
US-8986494-B2 · Mar 24, 2015 · US
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