Adaptive endpoint method for pad life effect on chemical mechanical polishing
US-9333619-B2 · May 10, 2016 · US
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Lee Chu-An — Physics
Lee Chu-An holds 1 patent in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Lee Chu-An |
| Technology | Physics |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2016 |
| Last year | 2016 |
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