Inspection apparatus and method for measuring a property of a substrate
US-9235141-B2 · Jan 12, 2016 · US
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Smilde Hendrik Jan Hidde patents
Smilde Hendrik Jan Hidde holds 5 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 5 |
| Recent patents | 0 |
| First publication | Jul 14, 2015 |
| Latest publication | Jan 12, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus
US-9229338-B2 · Jan 5, 2016 · US
Metrology method and inspection apparatus, lithographic system and device manufacturing method
US-9140998-B2 · Sep 22, 2015 · US
Methods and scatterometers, lithographic systems, and lithographic processing cells
US-9081303-B2 · Jul 14, 2015 · US
Substrate, an inspection apparatus, and a lithographic apparatus
US-9081304-B2 · Jul 14, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Inspection apparatus and method for measuring a property of a substrate
US-9235141-B2 · Jan 12, 2016 · US
Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus
US-9229338-B2 · Jan 5, 2016 · US
Metrology method and inspection apparatus, lithographic system and device manufacturing method
US-9140998-B2 · Sep 22, 2015 · US
Methods and scatterometers, lithographic systems, and lithographic processing cells
US-9081303-B2 · Jul 14, 2015 · US
Substrate, an inspection apparatus, and a lithographic apparatus
US-9081304-B2 · Jul 14, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| G03F7/70633 | 5 |
| G03F7/70625 | 3 |
| G03F7/70641 | 2 |
| G01N21/47 | 2 |
| H10P76/2041 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 5 |
| Electricity | 3 |
| Cross-Sectional Technologies | 2 |