Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
US-9696635-B2 · Jul 4, 2017 · US
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Megens Henricus Johannes Lambertus — Physics
Megens Henricus Johannes Lambertus holds 3 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Megens Henricus Johannes Lambertus |
| Technology | Physics |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2017 |
Representative patents
Notable publications linking Megens Henricus Johannes Lambertus to Physics.
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
US-9696635-B2 · Jul 4, 2017 · US
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
US-9696635-B2 · Jul 4, 2017 · US
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
US-9696635-B2 · Jul 4, 2017 · US
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
US-9696635-B2 · Jul 4, 2017 · US
Recent filings
Latest patents from Megens Henricus Johannes Lambertus in Physics.
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
US-9696635-B2 · Jul 4, 2017 · US
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
US-9696635-B2 · Jul 4, 2017 · US
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
US-9696635-B2 · Jul 4, 2017 · US
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
US-9696635-B2 · Jul 4, 2017 · US
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process
US-9696635-B2 · Jul 4, 2017 · US
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