Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus
US-9156122-B2 · Oct 13, 2015 · US
Nakamura Akira was listed as an assignee on 5 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Nakamura Akira |
| Year | 2015 |
| Patents | 5 |
Representative publications for Nakamura Akira in 2015.
US-9156122-B2 · Oct 13, 2015 · US
US-2015236533-A1 · Aug 20, 2015 · US
US-9110438-B2 · Aug 18, 2015 · US
US-2015140374-A1 · May 21, 2015 · US
US-2015079275-A1 · Mar 19, 2015 · US
Most common classification codes for Nakamura Akira in 2015.
| CPC | Patents |
|---|---|
| H02J7/54 | 2 |
| B05B1/3046 | 1 |
| B05B7/066 | 1 |
| B05B7/12 | 1 |
| B24B37/005 | 1 |
Navigate to parent entity pages.