Method of manufacturing an oxynitride film for a semiconductor device
US-9196473-B2 · Nov 24, 2015 · US
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Ota Yosuke patents
Ota Yosuke holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Apr 28, 2015 |
| Latest publication | Nov 24, 2015 |
Filing trend
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2015 | 4 |
| Year | Patents |
|---|---|
| 2015 | 4 |
Recent patents
Latest publications where this party is an assignee.
Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus
US-9123530-B2 · Sep 1, 2015 · US
Method of manufacturing semiconductor device and substrate processing apparatus
US-9039838-B2 · May 26, 2015 · US
Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus
US-9018104-B2 · Apr 28, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method of manufacturing an oxynitride film for a semiconductor device
US-9196473-B2 · Nov 24, 2015 · US
Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus
US-9123530-B2 · Sep 1, 2015 · US
Method of manufacturing semiconductor device and substrate processing apparatus
US-9039838-B2 · May 26, 2015 · US
Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus
US-9018104-B2 · Apr 28, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P14/6682 | 4 |
| H10P14/6339 | 4 |
| H01L21/0228 | 4 |
| H10P14/69215 | 3 |
| H01L21/02211 | 3 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 4 |
| Electricity | 4 |