Chamber for degassing substrates
US-2016336204-A1 · Nov 17, 2016 · US
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Evatec Ag patents in 2016
Evatec Ag was listed as an assignee on 7 patent publications in 2016.
| Metric | Value |
|---|---|
| Company | Evatec Ag |
| Year | 2016 |
| Patents | 7 |
Patents
Representative publications for Evatec Ag in 2016.
Apparatus and method for depositing a layer onto a substrate
US-9490166-B2 · Nov 8, 2016 · US
Method for depositing a group III nitride semiconductor film
US-9478420-B2 · Oct 25, 2016 · US
Vacuum treatment apparatus
US-2016265109-A1 · Sep 15, 2016 · US
Arc suppression and pulsing in high power impulse magnetron sputtering (hipims)
US-2016237554-A1 · Aug 18, 2016 · US
Top CPC classifications
Most common classification codes for Evatec Ag in 2016.
| CPC | Patents |
|---|---|
| C23C14/541 | 4 |
| C23C14/50 | 3 |
| C23C16/458 | 3 |
| C23C16/52 | 3 |
| H10P72/7612 | 3 |
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