Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
US-9911580-B2 · Mar 6, 2018 · US
This page is not indexed by search engines while we improve data quality.
Amano Tomihiro — Physics
Amano Tomihiro holds 1 patent in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Amano Tomihiro |
| Technology | Physics |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2018 |
| Last year | 2018 |
Representative patents
Notable publications linking Amano Tomihiro to Physics.
Recent filings
Latest patents from Amano Tomihiro in Physics.
Related pages
Navigate to parent entity pages.