Pattern forming method and resist composition
US-10126653-B2 · Nov 13, 2018 · US
Iwato Kaoru was listed as an assignee on 1 patent publication in 2018.
| Metric | Value |
|---|---|
| Company | Iwato Kaoru |
| Year | 2018 |
| Patents | 1 |
Representative publications for Iwato Kaoru in 2018.
US-10126653-B2 · Nov 13, 2018 · US
Most common classification codes for Iwato Kaoru in 2018.
| CPC | Patents |
|---|---|
| C08F220/283 | 1 |
| C08F220/287 | 1 |
| G03F7/0045 | 1 |
| G03F7/0046 | 1 |
| G03F7/0382 | 1 |
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