Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film
US-9223219-B2 · Dec 29, 2015 · US
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Iwato Kaoru patents in 2015
Iwato Kaoru was listed as an assignee on 7 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Iwato Kaoru |
| Year | 2015 |
| Patents | 7 |
Patents
Representative publications for Iwato Kaoru in 2015.
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
US-9152048-B2 · Oct 6, 2015 · US
Actinic-ray-sensitive or radiation-sensitive resin composition, and resist film using the same, pattern forming method, electronic device manufacturing method, and electronic device, each using the same
US-9140981-B2 · Sep 22, 2015 · US
Method of forming pattern and developer for use in the method
US-9097973-B2 · Aug 4, 2015 · US
Resist composition and method of forming pattern therewith
US-9017917-B2 · Apr 28, 2015 · US
Top CPC classifications
Most common classification codes for Iwato Kaoru in 2015.
| CPC | Patents |
|---|---|
| G03F7/0397 | 7 |
| G03F7/2041 | 7 |
| G03F7/0045 | 6 |
| G03F7/0046 | 6 |
| G03F7/0382 | 4 |
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