Method and apparatus for fast gas exchange, fast gas switching, and programmable gas delivery
US-9305810-B2 · Apr 5, 2016 · US
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Nangoy Roy C patents
Nangoy Roy C holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | May 19, 2015 |
| Latest publication | Apr 5, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Stationary actively-cooled shadow ring for heat dissipation in plasma chamber
US-9196498-B1 · Nov 24, 2015 · US
Bipolar electrostatic chuck for dicing tape thermal management during plasma dicing
US-9117868-B1 · Aug 25, 2015 · US
Cooling pedestal for dicing tape thermal management during plasma dicing
US-9034771-B1 · May 19, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Method and apparatus for fast gas exchange, fast gas switching, and programmable gas delivery
US-9305810-B2 · Apr 5, 2016 · US
Stationary actively-cooled shadow ring for heat dissipation in plasma chamber
US-9196498-B1 · Nov 24, 2015 · US
Bipolar electrostatic chuck for dicing tape thermal management during plasma dicing
US-9117868-B1 · Aug 25, 2015 · US
Cooling pedestal for dicing tape thermal management during plasma dicing
US-9034771-B1 · May 19, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P50/242 | 4 |
| H10P72/0468 | 3 |
| H10P54/00 | 3 |
| H10P50/692 | 3 |
| H10P50/286 | 3 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 4 |
| Cross-Sectional Technologies | 1 |