Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns
US-9665003-B2 · May 30, 2017 · US
Kim Go-Un was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Kim Go-Un |
| Year | 2017 |
| Patents | 1 |
Representative publications for Kim Go-Un in 2017.
Most common classification codes for Kim Go-Un in 2017.
| CPC | Patents |
|---|---|
| C08G2261/314 | 1 |
| C08G61/02 | 1 |
| G03F7/00 | 1 |
| G03F7/09 | 1 |
| G03F7/091 | 1 |
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