Immersion upper layer film forming composition and method of forming photoresist pattern
US-9182674-B2 · Nov 10, 2015 · US
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Nakagawa Hiroki — Physics
Nakagawa Hiroki holds 1 patent in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Nakagawa Hiroki |
| Technology | Physics |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2015 |
Representative patents
Notable publications linking Nakagawa Hiroki to Physics.
Immersion upper layer film forming composition and method of forming photoresist pattern
US-9182674-B2 · Nov 10, 2015 · US
Immersion upper layer film forming composition and method of forming photoresist pattern
US-9182674-B2 · Nov 10, 2015 · US
Immersion upper layer film forming composition and method of forming photoresist pattern
US-9182674-B2 · Nov 10, 2015 · US
Immersion upper layer film forming composition and method of forming photoresist pattern
US-9182674-B2 · Nov 10, 2015 · US
Recent filings
Latest patents from Nakagawa Hiroki in Physics.
Immersion upper layer film forming composition and method of forming photoresist pattern
US-9182674-B2 · Nov 10, 2015 · US
Immersion upper layer film forming composition and method of forming photoresist pattern
US-9182674-B2 · Nov 10, 2015 · US
Immersion upper layer film forming composition and method of forming photoresist pattern
US-9182674-B2 · Nov 10, 2015 · US
Immersion upper layer film forming composition and method of forming photoresist pattern
US-9182674-B2 · Nov 10, 2015 · US
Immersion upper layer film forming composition and method of forming photoresist pattern
US-9182674-B2 · Nov 10, 2015 · US
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