Microlithography projection exposure apparatus having at least two operating states
US-9529276-B2 · Dec 27, 2016 · US
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Mann Hans-Juergen — Electricity
Mann Hans-Juergen holds 3 patents in Electricity, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Mann Hans-Juergen |
| Technology | Electricity |
| Patents in slice | 3 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2016 |
Representative patents
Notable publications linking Mann Hans-Juergen to Electricity.
Imaging optics
US-9442386-B2 · Sep 13, 2016 · US
Projection objective having mirror elements with reflective coatings
US-9013678-B2 · Apr 21, 2015 · US
Recent filings
Latest patents from Mann Hans-Juergen in Electricity.
Microlithography projection exposure apparatus having at least two operating states
US-9529276-B2 · Dec 27, 2016 · US
Imaging optics
US-9442386-B2 · Sep 13, 2016 · US
Projection objective having mirror elements with reflective coatings
US-9013678-B2 · Apr 21, 2015 · US
Related pages
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