Gas bearing electrostatic chuck
US-9036326-B2 · May 19, 2015 · US
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Nayfeh Samir patents in 2015
Nayfeh Samir was listed as an assignee on 1 patent publication in 2015.
| Metric | Value |
|---|---|
| Company | Nayfeh Samir |
| Year | 2015 |
| Patents | 1 |
Patents
Representative publications for Nayfeh Samir in 2015.
Top CPC classifications
Most common classification codes for Nayfeh Samir in 2015.
| CPC | Patents |
|---|---|
| B23Q3/15 | 1 |
| H01L21/6831 | 1 |
| H02N13/00 | 1 |
| H10P72/72 | 1 |
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