Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid processing section
US-9436087-B2 · Sep 6, 2016 · US
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Sokudo Co Ltd — Physics
Sokudo Co Ltd holds 2 patents in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Sokudo Co Ltd |
| Technology | Physics |
| Patents in slice | 2 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2016 |
Representative patents
Notable publications linking Sokudo Co Ltd to Physics.
Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid processing section
US-9436087-B2 · Sep 6, 2016 · US
Substrate processing apparatus
US-2015013603-A1 · Jan 15, 2015 · US
Substrate processing apparatus
US-2015013603-A1 · Jan 15, 2015 · US
Recent filings
Latest patents from Sokudo Co Ltd in Physics.
Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid processing section
US-9436087-B2 · Sep 6, 2016 · US
Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid processing section
US-9436087-B2 · Sep 6, 2016 · US
Substrate processing apparatus
US-2015013603-A1 · Jan 15, 2015 · US
Substrate processing apparatus
US-2015013603-A1 · Jan 15, 2015 · US
Related pages
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