Extreme ultraviolet light generation apparatus
US-9301379-B2 · Mar 29, 2016 · US
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Igarashi Miwa — Physics
Igarashi Miwa holds 1 patent in Physics, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | Igarashi Miwa |
| Technology | Physics |
| Patents in slice | 1 |
| Recent patents in slice | 0 |
| First year | 2016 |
| Last year | 2016 |
Representative patents
Notable publications linking Igarashi Miwa to Physics.
Recent filings
Latest patents from Igarashi Miwa in Physics.
Extreme ultraviolet light generation apparatus
US-9301379-B2 · Mar 29, 2016 · US
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