Substrate processing apparatus and a method of manufacturing a semiconductor device
US-9236246-B2 · Jan 12, 2016 · US
Tsubota Yasutoshi holds 1 patent in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 1 |
| Recent patents | 0 |
| First publication | Jan 12, 2016 |
| Latest publication | Jan 12, 2016 |
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2016 | 1 |
| Year | Patents |
|---|---|
| 2016 | 1 |
Latest publications where this party is an assignee.
Representative or frequently cited publications from precomputed assignee stats.
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P72/7612 | 1 |
| H10P72/0604 | 1 |
| H10P72/0436 | 1 |
| H10P50/642 | 1 |
| H10P14/6504 | 1 |
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 1 |
| Electricity | 1 |