Apparatus and method for substrate clamping in a plasma chamber
US-9337072-B2 · May 10, 2016 · US
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Witty Derek R patents in 2016
Witty Derek R was listed as an assignee on 1 patent publication in 2016.
| Metric | Value |
|---|---|
| Company | Witty Derek R |
| Year | 2016 |
| Patents | 1 |
Patents
Representative publications for Witty Derek R in 2016.
Top CPC classifications
Most common classification codes for Witty Derek R in 2016.
| CPC | Patents |
|---|---|
| C23C16/52 | 1 |
| H01J37/32431 | 1 |
| H01L21/67069 | 1 |
| H01L21/67253 | 1 |
| H01L21/6831 | 1 |
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