Apparatus for controlling the temperature uniformity of a substrate
US-9267742-B2 · Feb 23, 2016 · US
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Rauf Shahid patents
Rauf Shahid holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Feb 10, 2015 |
| Latest publication | Feb 23, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Electron beam plasma source with arrayed plasma sources for uniform plasma generation
US-9129777-B2 · Sep 8, 2015 · US
Methods and apparatus for controlling plasma in a process chamber
US-8980760-B2 · Mar 17, 2015 · US
Electron beam plasma source with segmented beam dump for uniform plasma generation
US-8951384-B2 · Feb 10, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Apparatus for controlling the temperature uniformity of a substrate
US-9267742-B2 · Feb 23, 2016 · US
Electron beam plasma source with arrayed plasma sources for uniform plasma generation
US-9129777-B2 · Sep 8, 2015 · US
Methods and apparatus for controlling plasma in a process chamber
US-8980760-B2 · Mar 17, 2015 · US
Electron beam plasma source with segmented beam dump for uniform plasma generation
US-8951384-B2 · Feb 10, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H01J37/32082 | 2 |
| H01J37/3233 | 2 |
| H05H1/46 | 2 |
| F28F3/12 | 1 |
| F28F2013/001 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 3 |
| Mechanical Engineering | 1 |
| Physics | 1 |