Lithographic apparatus, spectral purity filter and device manufacturing method
US-9594306-B2 · Mar 14, 2017 · US
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De Boeij Wilhelmus Petrus — Electricity
De Boeij Wilhelmus Petrus holds 2 patents in Electricity, with representative filings summarized below.
| Metric | Value |
|---|---|
| Company | De Boeij Wilhelmus Petrus |
| Technology | Electricity |
| Patents in slice | 2 |
| Recent patents in slice | 0 |
| First year | 2015 |
| Last year | 2017 |
Representative patents
Notable publications linking De Boeij Wilhelmus Petrus to Electricity.
Lithographic apparatus, spectral purity filter and device manufacturing method
US-9594306-B2 · Mar 14, 2017 · US
Projection system and lithographic apparatus
US-9164401-B2 · Oct 20, 2015 · US
Recent filings
Latest patents from De Boeij Wilhelmus Petrus in Electricity.
Lithographic apparatus, spectral purity filter and device manufacturing method
US-9594306-B2 · Mar 14, 2017 · US
Lithographic apparatus, spectral purity filter and device manufacturing method
US-9594306-B2 · Mar 14, 2017 · US
Projection system and lithographic apparatus
US-9164401-B2 · Oct 20, 2015 · US
Related pages
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