Illumination system and projection objective of a mask inspection apparatus
US-10114293-B2 · Oct 30, 2018 · US
Mueller Ulrich holds 10 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 10 |
| Recent patents | 0 |
| First publication | Jan 6, 2015 |
| Latest publication | Oct 30, 2018 |
Year-over-year patent counts for this assignee.
Latest publications where this party is an assignee.
US-10114293-B2 · Oct 30, 2018 · US
US-2018208532-A1 · Jul 26, 2018 · US
US-9878906-B2 · Jan 30, 2018 · US
US-9289756-B2 · Mar 22, 2016 · US
US-9235142-B2 · Jan 12, 2016 · US
Representative or frequently cited publications from precomputed assignee stats.
US-10114293-B2 · Oct 30, 2018 · US
US-2018208532-A1 · Jul 26, 2018 · US
US-9878906-B2 · Jan 30, 2018 · US
US-9289756-B2 · Mar 22, 2016 · US
US-9235142-B2 · Jan 12, 2016 · US
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| G03F7/20 | 2 |
| H10P76/2041 | 2 |
| B01D2251/2062 | 2 |
| Y02C20/10 | 2 |
| B01J29/7007 | 2 |
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Operations & Transport | 6 |
| Cross-Sectional Technologies | 5 |
| Chemistry & Metallurgy | 5 |
| Physics | 4 |
| Electricity | 2 |
| Mechanical Engineering | 1 |
| Human Necessities | 1 |