Etch with pulsed bias
US-9059116-B2 · Jun 16, 2015 · US
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Lee Wonchul patents in 2015
Lee Wonchul was listed as an assignee on 1 patent publication in 2015.
| Metric | Value |
|---|---|
| Company | Lee Wonchul |
| Year | 2015 |
| Patents | 1 |
Patents
Representative publications for Lee Wonchul in 2015.
Top CPC classifications
Most common classification codes for Lee Wonchul in 2015.
| CPC | Patents |
|---|---|
| H01L21/31122 | 1 |
| H01L21/32136 | 1 |
| H01L21/32137 | 1 |
| H10P50/242 | 1 |
| H10P50/267 | 1 |
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