Substrate processing apparatus, substrate transfer method and substrate transfer device
US-9530676-B2 · Dec 27, 2016 · US
Yokoyama Toshio holds 1 patent in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 1 |
| Recent patents | 0 |
| First publication | Dec 27, 2016 |
| Latest publication | Dec 27, 2016 |
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2016 | 1 |
| Year | Patents |
|---|---|
| 2016 | 1 |
Latest publications where this party is an assignee.
Representative or frequently cited publications from precomputed assignee stats.
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P72/7602 | 1 |
| H10P72/3302 | 1 |
| H10P72/3202 | 1 |
| H10P72/0472 | 1 |
| H10P72/0464 | 1 |
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Operations & Transport | 1 |
| Electricity | 1 |