Endpointing with selective spectral monitoring
US-9221147-B2 · Dec 29, 2015 · US
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Osterheld Thomas H patents in 2015
Osterheld Thomas H was listed as an assignee on 3 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Osterheld Thomas H |
| Year | 2015 |
| Patents | 3 |
Patents
Representative publications for Osterheld Thomas H in 2015.
Temperature control of chemical mechanical polishing
US-9005999-B2 · Apr 14, 2015 · US
Selecting reference libraries for monitoring of multiple zones on a substrate
US-8954186-B2 · Feb 10, 2015 · US
Top CPC classifications
Most common classification codes for Osterheld Thomas H in 2015.
| CPC | Patents |
|---|---|
| H10P52/00 | 3 |
| B24B37/013 | 1 |
| B24B37/015 | 1 |
| B24B49/12 | 1 |
| G05B2219/31459 | 1 |
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