Substrate processing apparatus and substrate processing method
US-9583360-B2 · Feb 28, 2017 · US
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Hayashi Hisataka patents in 2017
Hayashi Hisataka was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Hayashi Hisataka |
| Year | 2017 |
| Patents | 1 |
Patents
Representative publications for Hayashi Hisataka in 2017.
Top CPC classifications
Most common classification codes for Hayashi Hisataka in 2017.
| CPC | Patents |
|---|---|
| H01J37/32091 | 1 |
| H01J37/32146 | 1 |
| H01J37/32174 | 1 |
| H01L21/31116 | 1 |
| H10P50/242 | 1 |
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