Consumable isolation ring for movable substrate support assembly of a plasma processing chamber
US-9171702-B2 · Oct 27, 2015 · US
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Kellogg Michael C patents in 2015
Kellogg Michael C was listed as an assignee on 2 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Kellogg Michael C |
| Year | 2015 |
| Patents | 2 |
Patents
Representative publications for Kellogg Michael C in 2015.
Gas feed insert in a plasma processing chamber and methods therefor
US-9111731-B2 · Aug 18, 2015 · US
Top CPC classifications
Most common classification codes for Kellogg Michael C in 2015.
| CPC | Patents |
|---|---|
| C23C16/4585 | 1 |
| H01B5/04 | 1 |
| H01J37/32091 | 1 |
| H01J37/3244 | 1 |
| H01J37/32495 | 1 |
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