Replaceable electrostatic chuck sidewall shield
US-9543181-B2 · Jan 10, 2017 · US
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Wang Yeh-Chieh patents in 2017
Wang Yeh-Chieh was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Wang Yeh-Chieh |
| Year | 2017 |
| Patents | 1 |
Patents
Representative publications for Wang Yeh-Chieh in 2017.
Top CPC classifications
Most common classification codes for Wang Yeh-Chieh in 2017.
| CPC | Patents |
|---|---|
| H01L21/6833 | 1 |
| H10P72/722 | 1 |
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