Actinic-ray- or radiation-sensitive resin composition, resist film therefrom and method of forming pattern therewith
US-9568824-B2 · Feb 14, 2017 · US
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Tsubaki Hideaki patents
Tsubaki Hideaki holds 6 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 6 |
| Recent patents | 0 |
| First publication | Feb 10, 2015 |
| Latest publication | Feb 14, 2017 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Chemical amplification resist composition, and mold preparation method and resist film using the same
US-9090722-B2 · Jul 28, 2015 · US
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
US-9052590-B2 · Jun 9, 2015 · US
Resist composition for negative tone development and pattern forming method using the same
US-9046782-B2 · Jun 2, 2015 · US
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
US-9005870-B2 · Apr 14, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Actinic-ray- or radiation-sensitive resin composition, resist film therefrom and method of forming pattern therewith
US-9568824-B2 · Feb 14, 2017 · US
Chemical amplification resist composition, and mold preparation method and resist film using the same
US-9090722-B2 · Jul 28, 2015 · US
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
US-9052590-B2 · Jun 9, 2015 · US
Resist composition for negative tone development and pattern forming method using the same
US-9046782-B2 · Jun 2, 2015 · US
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
US-9005870-B2 · Apr 14, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| G03F7/0392 | 6 |
| G03F7/0397 | 6 |
| G03F7/0046 | 5 |
| G03F7/0045 | 5 |
| H10P76/00 | 4 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Physics | 6 |
| Electricity | 5 |
| Operations & Transport | 1 |
| Chemistry & Metallurgy | 1 |
| Cross-Sectional Technologies | 1 |