Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatus
US-9046385-B2 · Jun 2, 2015 · US
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Deckers David patents in 2015
Deckers David was listed as an assignee on 2 patent publications in 2015.
| Metric | Value |
|---|---|
| Company | Deckers David |
| Year | 2015 |
| Patents | 2 |
Patents
Representative publications for Deckers David in 2015.
Top CPC classifications
Most common classification codes for Deckers David in 2015.
| CPC | Patents |
|---|---|
| G01B11/272 | 1 |
| G01B9/02 | 1 |
| G01D5/344 | 1 |
| G03F1/42 | 1 |
| G03F1/70 | 1 |
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